XGT*, High Vacuum Slit Valve

Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.

Long service life: 3 million cycles (within standard temperture range)
Low particle generation: reduced by 1/5 or more (compared with the current product)
Easier maintenance
Easy replacement of bellows
Gate can be replaced from above (Made to order)
Safety measures
A mechanical end lock mechanism has been adopted

Series Catalog

Official Distributor

Configure Product

Partial

Series Catalog

Select Product Options

	Select values from the drop down lists or make appropriate selections to configure the part number.
Type
Valve Size
Valve Type
Opening Window Size
Gate O-ring Material
Auto Switch & Connector
End Lock
	Options in: Gray are not compatible with other selected option value. Red conflict with another selected option value. Amber are not recommended.

Why Proax for SMC XGT*, High Vacuum Slit Valve?

Proax is the Elite distributor of SMC XGT*, High Vacuum Slit Valve. We are SMC's largest distributor in Canada. Our highly skilled in-house technical team is ready to assist with any technical needs.

Have a question in mind? to help you get the right etech as quickly as possible for your project. We're always here to help!

Short Lead Time

Highly Trained Staff

Live Chat

Technical Support

Local Inventory

60+ Years Experience

---